Optical film stress measurement tool

VTT Technical Research Centre of Finland Ltd

THE OBJECT OF THE TENDER PROCESS The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement. The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”). A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting. A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. Partial tenders will not be accepted. NON-MANDATORY OPTIONAL FEATURES Please see Annex 1 section 3.4.10 of the invitation to tender. The tenderer may offer the feature as an optional item in its tender. PLEASE NOTE: the optional item shall not be included in the comparison price of the device but shall be priced separately.

Määräaika

Deadline 2026-06-15

Kuka?

• VTT Technical Research Centre of Finland Ltd

Mitä?

• Laboratoriolaitteet, optiset ja tarkkuuslaitteet (lukuun ottamatta silmälaseja)

Missä?

• Helsinki-Uusimaa › Helsinki-Uusimaa

Hankintojen historia

Päivämäärä	Asiakirja
2026-05-15	hankintailmoitus

hankintailmoitus (2026-05-15)
Kohde
Hankinnan laajuus
Otsikko: Optical film stress measurement tool
Viitenumero: 613756
Lyhyt kuvaus:

Lyhyt kuvaus

THE OBJECT OF THE TENDER PROCESS

The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement.

The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”).

A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders.

The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting.

A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1.

Partial tenders will not be accepted.

NON-MANDATORY OPTIONAL FEATURES

Please see Annex 1 section 3.4.10 of the invitation to tender. The tenderer may offer the feature as an optional item in its tender. PLEASE NOTE: the optional item shall not be included in the comparison price of the device but shall be priced separately.

Sopimustyyppi: Tavarat
Tuotteet/palvelut: Laboratoriolaitteet, optiset ja tarkkuuslaitteet (lukuun ottamatta silmälaseja) 📦
Kuvaus
Sisäinen tunniste: 613756
Tämä hankinta soveltuu myös pienille ja keskisuurille yrityksille (pk-yrityksille) ✅
Lisätietoja:

The object of the tender process is described in more detail in the invitation to tender documents.

Edistettävä sosiaalinen tavoite: Ihmisoikeuksia koskeva due diligence -velvoite maailmanlaajuisissa toimitusketjuissa
Postiosoite: Tekniikantie 17
Postinumero: 02150
Postitoimipaikka: Espoo
Maa: Suomi 🇫🇮
Suorituspaikka: Helsinki-Uusimaa 🏙️
Kesto: 15 kuukautta
Myöntämisperusteet
Hinta ✅
Hinta (painotus): 80
Laatukriteeri (nimi): Quality comparison
Laatukriteeri (painotus): 20
Otsikko
Erän tunnistenumero: LOT-0000

Menettely
Toimenpiteen tyyppi
Avoin menettely ✅
Oikeusperusta: Direktiivi 2014/24/EU
Menettelyn tärkeimmät piirteet:

The tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold.

Hallinnolliset tiedot
Tarjousten tai osallistumishakemusten vastaanottamisen määräaika: 2026-06-15 09:00:00 📅
Tarjousten avaamista koskevat ehdot: 2026-06-15 09:01:00 📅
Kielet, joilla tarjoukset tai osallistumishakemukset voidaan jättää: englanti 🗣️
Vähimmäisaika, jonka kuluessa tarjoajan on pidettävä tarjous voimassa: 6 kuukautta
Tarjouspyynnön ehdot
Tarjoaja voi jättää useamman kuin yhden tarjouksen
Tarjousten avaamisen päivämäärä: 2026-06-15 09:01:00 📅
Sähköinen laskutus: Pakollinen
Sähköistä tilaamista käytetään ✅
Sähköistä maksua käytetään ✅
Lisätietojen pyytämisen määräaika: 2026-05-28 07:00:00 📅
Myöntämisperusteet
Painotustyyppi: Painotus (pisteinä, tarkka)

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+ 21 lisää

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Kuvaus poissulkemisperusteista:

The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for…

… corruption, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… fraud, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… money laundering or terrorist financing, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… participation in a criminal organisation, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… terrorist offences or offences linked to terrorist activities, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… child labour and other forms of trafficking in human beings, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

The economic operator has breached its obligations in the field of…

… environmental law.

… labour law.

… social law.

The economic operator has entered into agreements with other economic operators aimed at distorting competition.

The economic operator is guilty of grave professional misconduct.

The economic operator can confirm that: a) It has been guilty of serious misrepresentation in supplying the information required for the verification of the absence of grounds for exclusion or the fulfilment of the selection criteria, b) It has withheld such information, c) It has not been able, without delay, to submit the supporting documents required by a contracting authority or contracting entity, and d) It has undertaken to unduly influence the decision making process of the contracting authority or contracting entity, to obtain confidential information that may confer upon it undue advantages in the procurement procedure or to negligently provide misleading information that may have a material influence on decisions concerning exclusion, selection or award.

The economic operator is aware of any conflict of interest, as indicated in national law, the relevant notice or the procurement documents due to its participation in the procurement procedure.

The economic operator or an undertaking related to it has advised the contracting authority or contracting entity or otherwise been involved in the preparation of the procurement procedure.

The economic operator has experienced that a prior public contract, a prior contract with a contracting entity or a prior concession contract was terminated early, or that damages or other comparable sanctions were imposed in connection with that prior contract.

Any person who is a member of the economic operator’s administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for work safety offence, working hours offence, work discrimination, extortionate work discrimination, violation of the right to organise or unauthorised use of foreign labour.

The economic operator has breached its obligations relating to the payment…

… social security contributions, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.

… of taxes, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.

The business activities of the economic operator are suspended.

The economic operator is bankrupt.

The economic operator is in arrangement with creditors.

The economic operator is the subject of insolvency or winding-up.

The assets of the economic operator are being administered by a liquidator or by the court.

The economic operator is in any analogous situation like bankruptcy arising from a similar procedure under national laws and regulations.

Hankintaviranomainen
Nimi ja osoitteet
Nimi: VTT Technical Research Centre of Finland Ltd
Kansallinen rekisterinumero: 2647375-4
Postiosoite: P.O. Box 1000, VTT
Postinumero: 02044
Postitoimipaikka: Espoo
Alue: Helsinki-Uusimaa 🏙️
Maa: Suomi 🇫🇮
Yhteyspiste: VTT Technical Research Centre of Finland Ltd
Sähköposti: kilpailutus@vtt.fi 📧
Puhelin: +358 20722111 📞
URL: https://www.vttresearch.com/fi 🌏
Hankintaviranomaisen tyyppi
Julkisoikeudellinen yhteisö
Päätoimi
Talous- ja rahoitusasiat
Viestintä
Asiakirjojen URL-osoite: https://tarjouspalvelu.fi/vtt?id=613756&tpk=d8b82ca3-2e76-4a2e-9492-9f844286b076 🌏
Osallistumisen URL-osoite: https://tarjouspalvelu.fi/vtt?id=613756&tpk=d8b82ca3-2e76-4a2e-9492-9f844286b076 🌏
Tarjouksen/hakemuksen jättäminen sähköisesti: Pakollinen

Täydentävät tiedot
Lisätietoja

The object of the tender process is described in more detail in the invitation to tender documents.

Arvostelurunko
Nimi: Markkinaoikeus
Kansallinen rekisterinumero: 3006157-6
Postiosoite: Radanrakentajantie 5
Postinumero: 00520
Postitoimipaikka: Helsinki
Alue: Helsinki-Uusimaa 🏙️
Maa: Suomi 🇫🇮
Sähköposti: markkinaoikeus@oikeus.fi 📧
Puhelin: +358 295643300 📞
URL: http://www.oikeus.fi/markkinaoikeus 🌏
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Lähde: OJS 2026/S 095-342282 (2026-05-15)

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