Electron beam lithography (EBL) and laser beam lithography (LBL) systems

University of Jyväskylä

University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for research and development of state of the art micro- and nano-scale features requiring high fidelity in patterning and edge smoothness. Contracting authority has a need for high precision and versatile lithography tools for patterning of optical wave guides and lattices, phononic crystals and mechanic resonators; with the goal of investigating quantum phenomena and the interplay between such structures. Contracting authority has a need for the lithography tools to support integration of high fidelity nano-scale features into considerably larger designs, such as microfluidic networks with widths of about 100 um and lengths of several mm. Therefore, contracting authority puts emphasis on the two lithography systems having good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures on the same resist layer. The EBL and LBL systems should manage mix-and-match exposures with resists such as Shipley S1813, SU-8 and AZ5200-E series. Prior references of supplying comparable systems are required. Contracting authority (JYU) may suspend the procurement procedure if the price level of the tenders exceeds the budget available for the procurement

Määräaika

Tarjousten vastaanottamisen määräaika oli 2025-05-12. Hankinta julkaistiin 2025-04-08.

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Hankintojen historia
Päivämäärä Asiakirja
2025-04-08 hankintailmoitus
hankintailmoitus (2025-04-08)
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Otsikko: Electron beam lithography (EBL) and laser beam lithography (LBL) systems
Viitenumero: 49/02.03.00.00/2025
Lyhyt kuvaus:
University of Jyväskylä (JYU) is inviting tenders for a combination of an electron beam lithography system (EBL) and a laser beam lithography system (LBL), both capable of mix-and-match processing based on CAD drawings in GDSII file format. We are searching a Dedicated EBL tool AND a Dedicated LBL tool for research and development of state of the art micro- and nano-scale features requiring high fidelity in patterning and edge smoothness. Contracting authority has a need for high precision and versatile lithography tools for patterning of optical wave guides and lattices, phononic crystals and mechanic resonators; with the goal of investigating quantum phenomena and the interplay between such structures. Contracting authority has a need for the lithography tools to support integration of high fidelity nano-scale features into considerably larger designs, such as microfluidic networks with widths of about 100 um and lengths of several mm. Therefore, contracting authority puts emphasis on the two lithography systems having good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures on the same resist layer. The EBL and LBL systems should manage mix-and-match exposures with resists such as Shipley S1813, SU-8 and AZ5200-E series. Prior references of supplying comparable systems are required. Contracting authority (JYU) may suspend the procurement procedure if the price level of the tenders exceeds the budget available for the procurement
Näytä lisää
Sopimustyyppi: Tavarat
Tuotteet/palvelut: Laboratoriolaitteet, optiset ja tarkkuuslaitteet (lukuun ottamatta silmälaseja) 📦
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1️⃣
Sisäinen tunniste: 1
Otsikko: EBL system
Tämä hankinta soveltuu myös pienille ja keskisuurille yrityksille (pk-yrityksille) ✅
Hankinnan kuvaus:
A Dedicated EBL tool for fabrication of state of the art nano-scale structures. Contracting authority has a need for high precision and versatile tool which would be extremely useful in preparation of phononic and photonic structures, such as waveguides, gratings and meta-plasmonic structures. The EBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the LBL system in lot 2. Prior references of supplying comparable systems are required.
Näytä lisää
Edistettävä sosiaalinen tavoite: Ihmisoikeuksia koskeva due diligence -velvoite maailmanlaajuisissa toimitusketjuissa
Maa: Suomi 🇫🇮
Kesto: 12 kuukautta
Myöntämisperusteet
Hinta ✅
Hinta (painotus): 80
Laatukriteeri (nimi): Laatu
Laatukriteeri (painotus): 80
Otsikko
Erän tunnistenumero: LOT-0001

2️⃣
Sisäinen tunniste: 2.
Otsikko: LBL system
Hankinnan kuvaus:
A laser beam lithography system (LBL) for advanced microfabrication of semiconductor and biomedical devices. The system will be installed in a clean-room facility of class iso 5, forming part of a larger lithography research line. The system must meet high performance specifications for resolution. The system is intended for exposure of photoresists where suitable exposure wavelength is 375 nm. The majority of processing will occur on chips sized from 5 mm by 5 mm up to standard 4 inch diameter wafers, however we require that up to 5 x 5 inch substrates can fit into the system. The LBL system should have good support for mix-and-match lithography, i.e. well documented procedures for sharing CAD pattern libraries for straightforward implementation in mix-and-match exposures with the EBL system in lot 1. The system needs to be installed by the supplier. Prior references of supplying comparable systems are required.
Näytä lisää
Suorituspaikka: Keski-Suomi 🏙️
Myöntämisperusteet
Laatukriteeri (painotus): 20
Otsikko
Erän tunnistenumero: LOT-0002

Menettely
Toimenpiteen tyyppi
Avoin menettely ✅
Oikeusperusta: Direktiivi 2014/24/EU
Menettelyn tärkeimmät piirteet:
In an open procedure the contracting entity publishes a contract notice and places a call for tenders for the receivable, on which basis all prospective suppliers may submit their tenders. After the contract notice has been published and the call for tenders has been placed, the contracting entity may send the call for tenders to the suppliers that it considers suitable. A contracting entity may conclude a procurement agreement in the form of separate lots and may determine the size and subject-matter of such lots. Tenders must be submitted for both of the lots (EBL and LBL),
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Hallinnolliset tiedot
Tarjousten tai osallistumishakemusten vastaanottamisen määräaika: 2025-05-12 13:15:00 📅
Tarjousten avaamista koskevat ehdot: 2025-05-13 07:00:00 📅
Kielet, joilla tarjoukset tai osallistumishakemukset voidaan jättää: englanti 🗣️
Vähimmäisaika, jonka kuluessa tarjoajan on pidettävä tarjous voimassa: 3 kuukautta
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Tarjoaja voi jättää useamman kuin yhden tarjouksen
Tarjousten avaamisen päivämäärä: 2025-05-13 07:00:00 📅
Sähköinen laskutus: Pakollinen
Sähköistä maksua käytetään ✅
Lisätietojen pyytämisen määräaika: 2025-05-02 13:15:00 📅
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Painotustyyppi: Painotus (pisteinä, tarkka)

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The economic operator is in any analogous situation like bankruptcy arising from a similar procedure under national laws and regulations.
The economic operator is bankrupt.
The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for corruption, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
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The economic operator is in arrangement with creditors.
The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for participation in a criminal organisation, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
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The economic operator has entered into agreements with other economic operators aimed at distorting competition.
The economic operator has breached its obligations in the field of environmental law.
The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for…
… money laundering or terrorist financing, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
… fraud, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
… child labour and other forms of trafficking in human beings, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
The economic operator is the subject of insolvency or winding-up.
The economic operator has breached its obligations in the field of labour law.
The assets of the economic operator are being administered by a liquidator or by the court.
Any person who is a member of the economic operator’s administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for work safety offence, working hours offence, work discrimination, extortionate work discrimination, violation of the right to organise or unauthorised use of foreign labour.
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The economic operator is aware of any conflict of interest, as indicated in national law, the relevant notice or the procurement documents due to its participation in the procurement procedure.
The economic operator or an undertaking related to it has advised the contracting authority or contracting entity or otherwise been involved in the preparation of the procurement procedure.
The economic operator is guilty of grave professional misconduct.
The economic operator has experienced that a prior public contract, a prior contract with a contracting entity or a prior concession contract was terminated early, or that damages or other comparable sanctions were imposed in connection with that prior contract.
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The economic operator has breached its obligations in the field of social law.
The economic operator has breached its obligations relating to the payment social security contributions, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.
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The business activities of the economic operator are suspended.
The economic operator has breached its obligations relating to the payment of taxes, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.
The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for terrorist offences or offences linked to terrorist activities, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.
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Nimi: University of Jyväskylä
Kansallinen rekisterinumero: 0245894-7
Postiosoite: Seminaarinkatu 15
Postinumero: 40014
Postitoimipaikka: Jyväskylän yliopisto
Alue: Keski-Suomi 🏙️
Maa: Suomi 🇫🇮
Yhteyspiste: Hankintapalvelut
Sähköposti: hankinnat@jyu.fi 📧
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URL: http://www.jyu.fi 🌏
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Tietoa sähköisistä työnkuluista
Sähköinen laskutus hyväksytään
Lähde: OJS 2025/S 070-230844 (2025-04-08)
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