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2021-02-03LPCVD LTO/PSG Furnace (VTT Technical Research Centre of Finland Ltd)
The object of the procurement is LPCVD LTO/PSG furnace for VTT Micronova cleanroom front end. LPCVD furnace is for front end 200 mm and 150 mm wafer processing.
The object of the tender process is described in more detail in the invitation to tender documents.
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