Hankinnat: University of Helsinki / Department of Physics
Yksi arkistoitu hankinta
Viimeaikaiset hankinnat University of Helsinki / Department of Physics
2022-04-20
Ultra-high-vacuum chamber for thin-film synthesis (University of Helsinki / Department of Physics)
The Helsinki Accelerator Laboratory (HAL) at the Department of Physics of the University of Helsinki (UH) is going to acquire a multi-source ultra-high-vacuum (UHV) chamber for thin-film synthesis using magnetron sputtering and thermal evaporation. The magnetron sources will be capable of operating in direct-current magnetron sputtering (DCMS), radio-frequency magnetron sputtering (RFMS), and high-power impulse magnetron sputtering (HiPIMS) modes. Moreover, the chamber layout will allow for performing in โฆ Nรคytรค hankinnat ยป
The Helsinki Accelerator Laboratory (HAL) at the Department of Physics of the University of Helsinki (UH) is going to acquire a multi-source ultra-high-vacuum (UHV) chamber for thin-film synthesis using magnetron sputtering and thermal evaporation. The magnetron sources will be capable of operating in direct-current magnetron sputtering (DCMS), radio-frequency magnetron sputtering (RFMS), and high-power impulse magnetron sputtering (HiPIMS) modes. Moreover, the chamber layout will allow for performing in โฆ Nรคytรค hankinnat ยป