Hankinnat: University of Helsinki / Department of Physics
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2022-04-20Ultra-high-vacuum chamber for thin-film synthesis (University of Helsinki / Department of Physics)
The Helsinki Accelerator Laboratory (HAL) at the Department of Physics of the University of Helsinki (UH) is going to acquire a multi-source ultra-high-vacuum (UHV) chamber for thin-film synthesis using magnetron sputtering and thermal evaporation. The magnetron sources will be capable of operating in direct-current magnetron sputtering (DCMS), radio-frequency magnetron sputtering (RFMS), and high-power impulse magnetron sputtering (HiPIMS) modes. Moreover, the chamber layout will allow for performing in …
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