Single wafer plasma asher tool

VTT Technical Research Centre of Finland Ltd

The object of the tender process is Single wafer plasma asher tool (later also “Equipment”). The procurement object is a new 200 mm Single Wafer Plasma asher tool for the VTT Micronova cleanroom semiconductor front end. The procurement includes a process chamber for Polymer Removal and PR ash. The single-wafer plasma asher tool is for silicon semiconductor front-end, the tool must be compatible with industry-standard cleanroom requirements, including automated wafer handling, welded gas lines with VCR-gasket construction, particle filters, etc., and CE-compliant, with Emergency shutdown, capable processing of 200 mm including the following processes: Polymer removal PR ash (bulk strip, HDIS, Descums) The Single wafer asher tool will be used in silicon photonics devices, quantum devices, radiation detectors, and MEMS devices, which are the main product lines in the research fab. The object of the tender process is described in more detail in the invitation to tender documents.

Määräaika

Tarjousten vastaanottamisen määräaika oli 2025-01-20. Hankinta julkaistiin 2024-12-19.

Kuka?

• VTT Technical Research Centre of Finland Ltd

Mitä?

• Laboratoriolaitteet, optiset ja tarkkuuslaitteet (lukuun ottamatta silmälaseja)

Missä?

• Helsinki-Uusimaa › Helsinki-Uusimaa

Hankintojen historia

Päivämäärä	Asiakirja
2024-12-19	hankintailmoitus
2025-01-14	hankintailmoitus

hankintailmoitus (2024-12-19)
Kohde
Hankinnan laajuus
Otsikko: Single wafer plasma asher tool
Viitenumero: 75/206/2024
Lyhyt kuvaus:

Sopimustyyppi: Tavarat
Tuotteet/palvelut: Laboratoriolaitteet, optiset ja tarkkuuslaitteet (lukuun ottamatta silmälaseja) 📦
Suorituspaikkaa koskevat rajoitukset: Missä tahansa
Kuvaus
Sisäinen tunniste: 75/206/2024
Tämä hankinta soveltuu myös pienille ja keskisuurille yrityksille (pk-yrityksille) ✅
Lisätietoja:

The object of the tender process is described in more detail in the invitation to tender documents.

Edistettävä sosiaalinen tavoite: Ihmisoikeuksia koskeva due diligence -velvoite maailmanlaajuisissa toimitusketjuissa
Kesto: 12 kuukautta
Myöntämisperusteet
Hinta ✅
Hinta (painotus): 100
Otsikko
Erän tunnistenumero: LOT-0000

Menettely
Toimenpiteen tyyppi
Avoin menettely ✅
Oikeusperusta: Direktiivi 2014/24/EU
Menettelyn tärkeimmät piirteet:

The tender process is based on the open procedure applicable to contracts that exceed the EU procurement threshold.

Hallinnolliset tiedot
Tarjousten tai osallistumishakemusten vastaanottamisen määräaika: 2025-01-20 06:00:00 📅
Tarjousten avaamista koskevat ehdot: 2025-01-20 06:05:00 📅
Kielet, joilla tarjoukset tai osallistumishakemukset voidaan jättää: englanti 🗣️
Vähimmäisaika, jonka kuluessa tarjoajan on pidettävä tarjous voimassa: 6 kuukautta
Tarjouspyynnön ehdot
Tarjoaja voi jättää useamman kuin yhden tarjouksen
Tarjousten avaamisen päivämäärä: 2025-01-20 06:05:00 📅
Sähköinen laskutus: Sallittu
Sähköistä tilaamista käytetään ✅
Sähköistä maksua käytetään ✅
Lisätietojen pyytämisen määräaika: 2025-01-08 08:00:00 📅
Myöntämisperusteet
Painotustyyppi: Painotus (pisteinä, tarkka)

Oikeudelliset, taloudelliset, rahoitukselliset ja tekniset tiedot
Taloudellinen ja rahoituksellinen asema
Luettelo ja lyhyt kuvaus valintaperusteista:

Liability insurance: The tenderer must have valid liability insurance latest in the beginning of the contract period. The liability insurance must be relevant to the risks associated with the contract. The winner of the competitive bidding process must provide the supporting information on VTT’s request.

Statement of Financial and Other Operational Competence: Tenderer must be able to carry out the contract according to the invitation to tender. On VTT’s request, the tenderer commits to provide a statement of financial and other operational competence, taking into account the subject of the invitation to tender and other basic competences. The tenderer must be able to demonstrate ability to carry out the contract according to the invitation to tender.

Contractor’s obligations and liability when work is contracted out: The tenderer commits to provide VTT the information specified in the Act on the Contractor’s Obligations and Liability when Work is Contracted Out (1233/2006) 5§, in case the tenderer wins the competitive bidding process: 1) Information on whether the enterprise is entered in the Prepayment Register and Employment Register, and registered as VAT liable in the Value Added Tax Register; 2) Extract from the trade register or equivalent information otherwise obtained from the trade register; 3) Report on the contracting partner’s tax payment status; 4) Certificates of pension insurance taken out and of pension insurance premiums paid, or an account that a payment agreement on outstanding pension insurance premiums has been made; 5) Account of the collective agreement or principal terms of employment applicable to the work; 6) Account of the organization of occupational health care services; and 7) Certificates of statutory employment accident insurance taken out (in association with construction contracts) Similar information is required from a foreign tenderer (non-Finnish). The winner of the competitive bidding process must provide the supporting information on VTT’s request.

Osallistumisehdot
Luettelo ja lyhyt kuvaus säännöistä ja kriteereistä:

Environmental issues and corporate social responsibility (CSR): The supplier undertakes to comply with the business principles set by VTT (Annex 5 “Suppliers Code of Conduct” to the invitation to tender) in order to be a supplier of services to VTT.

Luettelo ja lyhyt kuvaus olosuhteista:

Enrolment in a trade register: It is enrolled in the relevant trade registers kept in the Member State of its establishment: It is enrolled in relevant professional registers kept in the Member State of its establishment as described in Annex XI of Directive 2014/24/EU; economic operators from certain Member States may have to comply with other requirements set out in that Annex.

Tekninen ja ammatillinen pätevyys
Luettelo ja lyhyt kuvaus valintaperusteista:

Experience (Company references): The suitability requirements are to ensure tenderer’s ability to fulfill and perform the procurement. A reference is a previous contract with a reference client carried out by the tenderer, based on which VTT is able to evaluate the ability of the tenderer to fulfill the procurement discussed in this invitation to tender. The tenderer must supply no less than five (5) references of contracts similar to the one discussed in the invitation to tender. The references must be from the last three (3) years. The Tenderer gives the references in Annex 3 “Experience (Company references)” and appends the annex to the tender The suitability requirements are to ensure tenderer’s ability to fulfill and perform the procurement. A reference is a previous contract with a reference client carried out by the tenderer, based on which VTT is able to evaluate the ability of the tenderer to fulfill the procurement discussed in this invitation to tender. The tenderer must supply no less than five (5) references of contracts similar to the one discussed in the invitation to tender. The references must be from the last three (3) years. The tenderer lists all the references (the names of the reference organisations) to the field “Description” below. Additional information is given in Annex 3 “Experience (Company references).The tender enters amount of given references to the field "Amount" below. The tenderer gives the references in Annex 3 “Experience (Company references)” and appends the Annex to the tender. All references must include information about the client and contact persons as well as a brief description of the project. The description must clearly indicate the fulfillment of the minimum requirements.

Luettelo ja lyhyt kuvaus valintaperusteista

Experience (Company references): The suitability requirements are to ensure tenderer’s ability to fulfill and perform the procurement.

A reference is a previous contract with a reference client carried out by the tenderer, based on which VTT is able to evaluate the ability of the tenderer to fulfill the procurement discussed in this invitation to tender.

The tenderer must supply no less than five (5) references of contracts similar to the one discussed in the invitation to tender. The references must be from the last three (3) years.

The Tenderer gives the references in Annex 3 “Experience (Company references)” and appends the annex to the tender

The suitability requirements are to ensure tenderer’s ability to fulfill and perform the procurement.

A reference is a previous contract with a reference client carried out by the tenderer, based on which VTT is able to evaluate the ability of the tenderer to fulfill the procurement discussed in this invitation to tender.

The tenderer must supply no less than five (5) references of contracts similar to the one discussed in the invitation to tender. The references must be from the last three (3) years.

The tenderer lists all the references (the names of the reference organisations) to the field “Description” below. Additional information is given in Annex 3 “Experience (Company references).The tender enters amount of given references to the field "Amount" below.

The tenderer gives the references in Annex 3 “Experience (Company references)” and appends the Annex to the tender. All references must include information about the client and contact persons as well as a brief description of the project. The description must clearly indicate the fulfillment of the minimum requirements.

Osallistumisehdot
Poissulkemisperuste:

Ennenaikainen irtisanominen, vahingonkorvaukset tai muut vastaavat seuraamukset

Järjestelyt velkojien kanssa

Kansallisesta lainsäädännöstä johtuva konkurssia tai muuta sellaista vastaava tilanne

+ 18 lisää

Konkurssi

Korruptio

Lapsityövoima ja muut ihmiskaupan muodot

Liiketoiminta on keskeytetty

Maksukyvyttömyys

Petos

Puhtaasti kansalliset poissulkemisperusteet

Rahanpesu tai terrorismin rahoitus

Rikollisjärjestön toimintaan osallistuminen

Sosiaaliturvamaksujen maksaminen

Syyllistyminen ammatin harjoittamiseen liittyvään vakavaan virheeseen

Syyllistyminen väärien tietojen antamiseen, tietojen antamatta jättämiseen, vaadittujen asiakirjojen antamiseen kykenemättömien tietojen toimittamiseen ja tätä menettelyä koskevien luottamuksellisten tietojen antamiseen

Talouden toimijan hankintamenettelyyn osallistumisesta johtuvat eturistiriidat

Terrorismirikokset tai terroritoimintaan liittyvät rikokset

Toisten talouden toimijoiden kanssa kilpailun vääristämiseksi tehdyt sopimukset

Varat selvitysmiehen hallinnassa

Verojen maksu

Välitön tai välillinen osallistuminen tämän hankintamenettelyn valmisteluun

Kuvaus poissulkemisperusteista:

The economic operator is in any analogous situation like bankruptcy arising from a similar procedure under national laws and regulations.

The economic operator is bankrupt.

The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for corruption, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

The economic operator is in arrangement with creditors.

The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for participation in a criminal organisation, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

The economic operator has entered into agreements with other economic operators aimed at distorting competition.

… money laundering or terrorist financing, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… fraud, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

… child labour and other forms of trafficking in human beings, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

The economic operator is the subject of insolvency or winding-up.

The assets of the economic operator are being administered by a liquidator or by the court.

The economic operator can confirm that: a) It has been guilty of serious misrepresentation in supplying the information required for the verification of the absence of grounds for exclusion or the fulfilment of the selection criteria, b) It has withheld such information, c) It has not been able, without delay, to submit the supporting documents required by a contracting authority or contracting entity, and d) It has undertaken to unduly influence the decision making process of the contracting authority or contracting entity, to obtain confidential information that may confer upon it undue advantages in the procurement procedure or to negligently provide misleading information that may have a material influence on decisions concerning exclusion, selection or award.

Any person who is a member of the economic operator’s administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for work safety offence, working hours offence, work discrimination, extortionate work discrimination, violation of the right to organise or unauthorised use of foreign labour.

The economic operator is aware of any conflict of interest, as indicated in national law, the relevant notice or the procurement documents due to its participation in the procurement procedure.

The economic operator or an undertaking related to it has advised the contracting authority or contracting entity or otherwise been involved in the preparation of the procurement procedure.

The economic operator is guilty of grave professional misconduct.

The economic operator has experienced that a prior public contract, a prior contract with a contracting entity or a prior concession contract was terminated early, or that damages or other comparable sanctions were imposed in connection with that prior contract.

The economic operator has breached its obligations relating to the payment social security contributions, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.

The business activities of the economic operator are suspended.

The economic operator has breached its obligations relating to the payment of taxes, both in the country in which it is established and in Member State of the contracting authority or contracting entity if other than the country of establishment.

The economic operator itself or any person who is a member of its administrative, management or supervisory body or has powers of representation, decision or control therein has been the subject of a conviction by final judgment for terrorist offences or offences linked to terrorist activities, by a conviction rendered at the most five years ago or in which an exclusion period set out directly in the conviction continues to be applicable.

Hankintaviranomainen
Nimi ja osoitteet
Nimi: VTT Technical Research Centre of Finland Ltd
Kansallinen rekisterinumero: 2647375-4
Postiosoite: P.O. Box 1000, VTT
Postinumero: 02044
Postitoimipaikka: Espoo
Alue: Helsinki-Uusimaa 🏙️
Maa: Suomi 🇫🇮
Yhteyspiste: VTT Technical Research Centre of Finland Ltd
Sähköposti: kilpailutus@vtt.fi 📧
Puhelin: +358 20722111 📞
URL: https://www.vttresearch.com/fi 🌏
Hankintaviranomaisen tyyppi
Julkisoikeudellinen yhteisö
Päätoimi
Talous- ja rahoitusasiat
Viestintä
Asiakirjojen URL-osoite: https://tarjouspalvelu.fi/vtt?id=537071&tpk=b60f45a7-42b7-473e-a28f-7412e7cdea54 🌏
Osallistumisen URL-osoite: https://tarjouspalvelu.fi/vtt?id=537071&tpk=b60f45a7-42b7-473e-a28f-7412e7cdea54 🌏
Tarjouksen/hakemuksen jättäminen sähköisesti: Pakollinen

Täydentävät tiedot
Lisätietoja

The object of the tender process is described in more detail in the invitation to tender documents.

Arvostelurunko
Nimi: Markkinaoikeus
Kansallinen rekisterinumero: 3006157-6
Postiosoite: Radanrakentajantie 5
Postinumero: 00520
Postitoimipaikka: Helsinki
Alue: Helsinki-Uusimaa 🏙️
Maa: Suomi 🇫🇮
Sähköposti: markkinaoikeus@oikeus.fi 📧
Puhelin: +358 295643300 📞
URL: http://www.oikeus.fi/markkinaoikeus 🌏
Tietoa sähköisistä työnkuluista
Sähköinen laskutus hyväksytään
Lähde: OJS 2024/S 248-786533 (2024-12-19)

hankintailmoitus (2025-01-14)
Menettely
Hallinnolliset tiedot
Tarjousten tai osallistumishakemusten vastaanottamisen määräaika: 2025-01-23 14:00:00 📅
Tarjousten avaamista koskevat ehdot: 2025-01-23 14:05:00 📅
Tarjouspyynnön ehdot
Tarjousten avaamisen päivämäärä: 2025-01-23 14:05:00 📅

Muutokset
Alkuperäiseen ilmoitukseen korjattava teksti
Erän tunnistenumero: LOT-0000
Muut lisätiedot

In Annex 1, Process ware 1.2.8 sentence: "Only quartz/ceramic parts and anodized Al may be inside the process chamber during the processing." will be changed to "Only quartz/ceramic parts and (Anodized or Non-Anodized) Al may be inside the process chamber during the processing. Note that tender submitting date is changed to 23.1.2025

Muutoksen pääasiallinen syy: Julkaisijan virheen korjaaminen
Tiedot muutoksista
Muutettavan ilmoituksen edellinen versio: 95e24a51-c51e-48f1-9819-cb59555e6be6-01
Lähde: OJS 2025/S 011-032534 (2025-01-14)

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