VTT is looking to acquire a new or a pre-owned projection exposure system for photolithographic processes in the i-line bandwidth. This exposure system will be further called wafer “stepper”. The system of interest has the lens with property of image reduction in ratio of 1:5 or 1:4. The stepper has to be fully automated and capable of processing 150mm and 200mm ø substrates. The type of wafers the tool should be able to process are described further. The tool should be of cleanliness class 1 of the SEMI standard. The supplier will take in consideration the environmental conditions of the tool installation location and will work together on to reduce the external impact on quality output. Possible floor vibrations to be constrained by common efforts.
For a pre-owned equipment, the age should be less than 10 years old. VTT will accept a pre-owned system only from the original equipment manufacturer.
The tool must comply with the cleanroom equipment standard health, safety and environmental requirements. More technical details are described in separate sections of this specification.
The pricing of the equipment will consist of the main price for the tool minimum requirements (“total price of the equipment”) and a separate price for the optional parts, features and efforts. The optional goods offered are not included in the total price of the equipment. All parts and accessories necessary for the exposure of 200 mm wafers must be included in the delivery and the main price.
More technical details and specification of the equipment is described in the invitation to tender documents.
Määräaika
Tarjousten vastaanottamisen määräaika oli 2023-03-31.
Hankinta julkaistiin 2023-02-24.
Kohde Hankinnan laajuus
Otsikko: i-line STEPPER for nanofabrication processes
Reg. no. 5/206/2023
Tuotteet/palvelut: Teollisuuskoneet📦
Lyhyt kuvaus:
“VTT is looking to acquire a new or a pre-owned projection exposure system for photolithographic processes in the i-line bandwidth. This exposure system will...”
Lyhyt kuvaus
VTT is looking to acquire a new or a pre-owned projection exposure system for photolithographic processes in the i-line bandwidth. This exposure system will be further called wafer “stepper”. The system of interest has the lens with property of image reduction in ratio of 1:5 or 1:4. The stepper has to be fully automated and capable of processing 150mm and 200mm ø substrates. The type of wafers the tool should be able to process are described further. The tool should be of cleanliness class 1 of the SEMI standard. The supplier will take in consideration the environmental conditions of the tool installation location and will work together on to reduce the external impact on quality output. Possible floor vibrations to be constrained by common efforts.
For a pre-owned equipment, the age should be less than 10 years old. VTT will accept a pre-owned system only from the original equipment manufacturer.
The tool must comply with the cleanroom equipment standard health, safety and environmental requirements. More technical details are described in separate sections of this specification.
The pricing of the equipment will consist of the main price for the tool minimum requirements (“total price of the equipment”) and a separate price for the optional parts, features and efforts. The optional goods offered are not included in the total price of the equipment. All parts and accessories necessary for the exposure of 200 mm wafers must be included in the delivery and the main price.
More technical details and specification of the equipment is described in the invitation to tender documents.
1️⃣
Suorituspaikka: Manner-Suomi🏙️
Hankinnan kuvaus:
“VTT is looking to acquire a new or a pre-owned projection exposure system for photolithographic processes in the i-line bandwidth. This exposure system will...”
Hankinnan kuvaus
VTT is looking to acquire a new or a pre-owned projection exposure system for photolithographic processes in the i-line bandwidth. This exposure system will be further called wafer “stepper”. The system of interest has the lens with property of image reduction in ratio of 1:5 or 1:4. The stepper has to be fully automated and capable of processing 150mm and 200mm ø substrates. The type of wafers the tool should be able to process are described further. The tool should be of cleanliness class 1 of the SEMI standard. The supplier will take in consideration the environmental conditions of the tool installation location and will work together on to reduce the external impact on quality output. Possible floor vibrations to be constrained by common efforts.
For a pre-owned equipment, the age should be less than 10 years old. VTT will accept a pre-owned system only from the original equipment manufacturer.
The tool must comply with the cleanroom equipment standard health, safety and environmental requirements. More technical details are described in separate sections of this specification.
The pricing of the equipment will consist of the main price for the tool minimum requirements (“total price of the equipment”) and a separate price for the optional parts, features and efforts. The optional goods offered are not included in the total price of the equipment. All parts and accessories necessary for the exposure of 200 mm wafers must be included in the delivery and the main price.
More technical details and specification of the equipment to be supplied is discussed in Annex 1.
The objective is to find one professional supplier who can supply Equipment and installation and user training in its entirety. VTT Technical Research Centre of Finland Ltd will choose one supplier from among the tenderers.
The objective is for the equipment to be supplied by February 2025 at the latest.
Näytä lisää Myöntämisperusteet
Hinta ei ole ainoa myöntämisperuste, ja kaikki perusteet ilmoitetaan ainoastaan hankinta-asiakirjoissa
Sopimuksen, puitesopimuksen tai dynaamisen hankintajärjestelmän kesto
Jäljempänä oleva aikataulu on ilmaistu kuukausina.
Kuvaus
Kesto: 24
Tietoa vaihtoehdoista
Vaihtoehdot ✅
Vaihtoehtojen kuvaus: The options have been described in the invitation to tender documents.
Oikeudelliset, taloudelliset, rahoitukselliset ja tekniset tiedot Osallistumisehdot
Luettelo ja lyhyt kuvaus olosuhteista: As stated in the invitation to tender documents.
Taloudellinen ja rahoituksellinen asema
Luettelo ja lyhyt kuvaus valintaperusteista: Selection criteria as stated in the invitation to tender documents
Tekninen ja ammatillinen pätevyys
Luettelo ja lyhyt kuvaus valintaperusteista: Selection criteria as stated in the invitation to tender documents
Sopimukseen liittyvät ehdot
Sopimuksen täytäntöönpanoehdot: As stated in the invitation to tender documents.
Menettely Toimenpiteen tyyppi
Avoin menettely
Hallinnolliset tiedot
Tarjousten tai osallistumishakemusten vastaanottamisen määräaika: 2023-03-31
12:00 📅
Kielet, joilla tarjoukset tai osallistumishakemukset voidaan jättää: englanti 🗣️
Tarjouksen on oltava voimassa: 2023-08-31 📅
Tarjousten avaamista koskevat ehdot: 2023-03-31
12:30 📅
Tarjousten avaamista koskevat ehdot (Tiedot valtuutetuista henkilöistä ja avaamismenettelystä):
“The given date is preliminary. VTT reserves the right to change the scheduled date and time.
The opening of tenders shall not be a public event.”
Täydentävät tiedot Lisätietoja
“This notice has links and/or attachments listed in https://www.hankintailmoitukset.fi/en/public/procurement/83442/notice/121318” Arvostelurunko
Nimi: Markkinaoikeus
Postiosoite: Sörnäistenkatu 1
Postitoimipaikka: Helsinki
Postinumero: 00580
Maa: Suomi 🇫🇮
Puhelin: +358 295643300📞
Sähköposti: markkinaoikeus@oikeus.fi📧
URL: http://www.oikeus.fi/markkinaoikeus🌏
Lähde: OJS 2023/S 043-126379 (2023-02-24)