The object of the tender process is Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd. (VTT) and Aalto University for research, development and small-volume production. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools.
The basic use for equipment is to detect particles and other defects and scratches on unpatterned silicon wafers and different materials on silicon surface. The tool must be non-contact and non-destructive for determining particles and defects on the surfaces of specific materials on silicon substrate. Typical materials to be analyzed are semiconductors, oxides, nitrides metals and photoresists.
The tool must be compatible with installation in an ISO 4 classified cleanroom. The tool must have an automatic mapping stage control system, and the stage must be suitable for 150 mm- and 200 mm silicon wafers. All parts needed for measuring 150 mm and 200 mm silicon wafers must be included in the offer.
The object of the tender process is described in more detail in the invitation to tender documents.
Määräaika
Tarjousten vastaanottamisen määräaika oli 2022-11-17.
Hankinta julkaistiin 2022-10-14.
Toimittajat
Seuraavat toimittajat mainitaan hankintapäätöksissä tai muissa hankinta-asiakirjoissa:
Kohde Hankinnan laajuus
Otsikko: PARTICLE MEASUREMENT TOOL
REG. NO. 50/206/2022
Tuotteet/palvelut: Sähkölaitteet ja -kojeet📦
Lyhyt kuvaus:
“The object of the tender process is Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in...”
Lyhyt kuvaus
The object of the tender process is Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd. (VTT) and Aalto University for research, development and small-volume production. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools.
The basic use for equipment is to detect particles and other defects and scratches on unpatterned silicon wafers and different materials on silicon surface. The tool must be non-contact and non-destructive for determining particles and defects on the surfaces of specific materials on silicon substrate. Typical materials to be analyzed are semiconductors, oxides, nitrides metals and photoresists.
The tool must be compatible with installation in an ISO 4 classified cleanroom. The tool must have an automatic mapping stage control system, and the stage must be suitable for 150 mm- and 200 mm silicon wafers. All parts needed for measuring 150 mm and 200 mm silicon wafers must be included in the offer.
The object of the tender process is described in more detail in the invitation to tender documents.
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Suorituspaikka: Manner-Suomi🏙️
Hankinnan kuvaus:
“The object of the tender process is Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in...”
Hankinnan kuvaus
The object of the tender process is Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd. (VTT) and Aalto University for research, development and small-volume production. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools.
The basic use for equipment is to detect particles and other defects and scratches on unpatterned silicon wafers and different materials on silicon surface. The tool must be non-contact and non-destructive for determining particles and defects on the surfaces of specific materials on silicon substrate. Typical materials to be analyzed are semiconductors, oxides, nitrides metals and photoresists.
The tool must be compatible with installation in an ISO 4 classified cleanroom. The tool must have an automatic mapping stage control system, and the stage must be suitable for 150 mm- and 200 mm silicon wafers. All parts needed for measuring 150 mm and 200 mm silicon wafers must be included in the offer.
The object of this tender process has been described in more detail in Annex 1 “Technical properties and functionality, performance specifications and acceptance criteria” to this invitation to tender.
Näytä lisää Myöntämisperusteet
Hinta ei ole ainoa myöntämisperuste, ja kaikki perusteet ilmoitetaan ainoastaan hankinta-asiakirjoissa
Sopimuksen, puitesopimuksen tai dynaamisen hankintajärjestelmän kesto
Jäljempänä oleva aikataulu on ilmaistu kuukausina.
Kuvaus
Kesto: 12
Oikeudelliset, taloudelliset, rahoitukselliset ja tekniset tiedot Osallistumisehdot
Luettelo ja lyhyt kuvaus olosuhteista: As stated in the invitation to tender documents.
Taloudellinen ja rahoituksellinen asema
Luettelo ja lyhyt kuvaus valintaperusteista: Selection criteria as stated in the invitation to tender documents
Tekninen ja ammatillinen pätevyys
Luettelo ja lyhyt kuvaus valintaperusteista: Selection criteria as stated in the invitation to tender documents
Sopimukseen liittyvät ehdot
Sopimuksen täytäntöönpanoehdot: As stated in the invitation to tender documents.
Menettely Toimenpiteen tyyppi
Avoin menettely
Hallinnolliset tiedot
Tarjousten tai osallistumishakemusten vastaanottamisen määräaika: 2022-11-17
12:00 📅
Kielet, joilla tarjoukset tai osallistumishakemukset voidaan jättää: englanti 🗣️
Tarjouksen on oltava voimassa: 2023-02-28 📅
Tarjousten avaamista koskevat ehdot: 2022-11-17
12:30 📅
Tarjousten avaamista koskevat ehdot (Tiedot valtuutetuista henkilöistä ja avaamismenettelystä):
“The given date is preliminary. VTT reserves the right to change the scheduled date and time.
The opening of tenders shall not be a public event.”
Täydentävät tiedot Lisätietoja
“This notice has links and/or attachments listed in https://www.hankintailmoitukset.fi/en/public/procurement/76738/notice/110663” Arvostelurunko
Nimi: Markkinaoikeus
Postiosoite: Sörnäistenkatu 1
Postitoimipaikka: Helsinki
Postinumero: 00580
Maa: Suomi 🇫🇮
Puhelin: +358 295643300📞
Sähköposti: markkinaoikeus@oikeus.fi📧
URL: http://www.oikeus.fi/markkinaoikeus🌏
Lähde: OJS 2022/S 202-574294 (2022-10-14)
Ilmoitus tehdystä sopimuksesta (2023-08-28) Kohde Hankinnan laajuus
Otsikko: PARTICLE MEASUREMENT TOOL
Reg. no. 50/206/2022
Lyhyt kuvaus:
“The object of the tender process was Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in...”
Lyhyt kuvaus
The object of the tender process was Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd. (VTT) and Aalto University for research, development and small-volume production. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools.
The basic use for equipment is to detect particles and other defects and scratches on unpatterned silicon wafers and different materials on silicon surface. The tool must be non-contact and non-destructive for determining particles and defects on the surfaces of specific materials on silicon substrate. Typical materials to be analyzed are semiconductors, oxides, nitrides metals and photoresists.
The tool must be compatible with installation in an ISO 4 classified cleanroom. The tool must have an automatic mapping stage control system, and the stage must be suitable for 150 mm- and 200 mm silicon wafers. All parts needed for measuring 150 mm and 200 mm silicon wafers must be included in the offer.
The object of the tender process was described in more detail in the invitation to tender documents.
Näytä lisää
Hankinnan kokonaisarvo (ilman arvonlisäveroa): EUR 610 000 💰
Kuvaus
Hankinnan kuvaus:
“The object of the tender process was Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in...”
Hankinnan kuvaus
The object of the tender process was Particle measurement tool (later “equipment” or “tool”). The equipment will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd. (VTT) and Aalto University for research, development and small-volume production. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement tools.
The basic use for equipment is to detect particles and other defects and scratches on unpatterned silicon wafers and different materials on silicon surface. The tool must be non-contact and non-destructive for determining particles and defects on the surfaces of specific materials on silicon substrate. Typical materials to be analyzed are semiconductors, oxides, nitrides metals and photoresists.
The tool must be compatible with installation in an ISO 4 classified cleanroom. The tool must have an automatic mapping stage control system, and the stage must be suitable for 150 mm- and 200 mm silicon wafers. All parts needed for measuring 150 mm and 200 mm silicon wafers must be included in the offer.
The object of the tender process was described in more detail in the invitation to tender documents.
Näytä lisää Myöntämisperusteet
Laatukriteeri (nimi): Quality
Laatukriteeri (painotus): 0
Hinta (painotus): 100
Menettely Hallinnolliset tiedot
Tätä menettelyä koskeva aiempi julkaisu: 2022/S 202-574294
Sopimuksen tekeminen
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Sopimuksen numero: Reg. no. 50/206/2022
Otsikko: Particle measurement tool
Sopimuksen tekopäivä: 2023-08-08 📅
Tietoa tarjouskilpailuista
Saatujen tarjousten määrä: 2
Pk-yrityksiltä saatujen tarjousten määrä: 0
Sähköisesti vastaanotettujen tarjousten määrä: 2
Toimeksisaajan nimi ja osoite
Nimi: KLA Corporation
Kansallinen rekisterinumero: 20853
Postitoimipaikka: 95035 Milpitas
Maa: Yhdysvallat 🇺🇸
Alue: us 🏙️
Toimeksisaaja on pk-yritys
Tiedot sopimuksen/erän arvosta (ilman alv:tä)
Sopimuksen/osuuden kokonaisarvo: EUR 610 000 💰
Lähde: OJS 2023/S 168-527207 (2023-08-28)