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2022-06-16OXIDATION, SINTERING, AND ANNEALING FURNACES (VTT Technical Research Centre of Finland Ltd)
The object of the procurement is an Atmospheric Oxidation, Sintering, Annealing furnace stack (4 tubes) for the VTT Micronova cleanroom front end (later “equipment”) will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd (VTT) and Aalto University for research, development and small-volume production of semiconductor devices. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is …
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