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2016-08-04Automatic Electro-Optical Wafer Level Prober (EO-WLT) (VTT Technical Research Centre of Finland Ltd)
The Automatic Electro-Optical Wafer Level Tests System (hereinafter EO-WLT) is a fully automatic 200mm probing system. Cassette loading with robotic wafer handling system, pre-aligner and vacuum end effector. EO-WLT system shall be configured to work with a combination of DC and RF probe-cards as well as with VTT-designed optical probes.
The procurement is described in detail in the call for tenders documents.
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