Hankinnat: University of Helsinki/Chemistry Department
Yksi arkistoitu hankinta
Historiallisesti University of Helsinki/Chemistry Department toimittajia ovat olleet Beneq Oy ja Prevac sp. z o.o..
Viimeaikaiset hankinnat University of Helsinki/Chemistry Department
2019-12-12Vacuum Cluster Connecting an ALD Reactor to Surface Analytical Instrument (University of Helsinki/Chemistry Department)
The instrument will be acquired for Chemistry Department, University of Helsinki. The aim is to study atomic layer deposition (and etching) process mechanisms. The system connects an ALD reactor to a UHV cluster containing at least XPS (X-ray photoelectron spectroscopy) and TPD (temperature programmed desorption) chambers, optionally also FTIR chamber. Samples can be transferred through loadlocks from the ALD reactor to the UHV cluster and back. Samples are not full wafers but smaller pieces which in the …
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