Optical profilometer, Reg. No: 433/060/2013
The optical profilometer is optical equipment using non-contact method to measure a surface's profile, in order to quantify its roughness, step height, trench depth, etc. The tool should be equipped with both Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI) measurement modes. The automated sample stage should be able to travel and measure the full range of an 8 inch (200 mm) wafer. Optical objectives should be fitted to a motorized turret so that they can be switched by software operation or a joystick. The technical specification of the equipment to be supplied is discussed in more detail in the invitation to tender documents.
The optical profilometer will be installed in the Micronova Nanofabrication Centre cleanroom, jointly used by VTT and Aalto University for research, development and small-volume production of MEMS- and nanoelectronic devices and materials. The cleanroom classification is ISO4…ISO 6 (10…1000). The total area of the cleanroom is 2600 m2 and there is an installed equipment base of 200 processing and measurement tools.
The objective is to find a professional supplier that can guarantee a high standard of quality. VTT Technical Research Centre of Finland will choose one supplier from among the tenderers.
The objective is for the equipment to be supplied by the end of 2013 at the latest.
Määräaika
Tarjousten vastaanottamisen määräaika oli 2013-09-02.
Hankinta julkaistiin 2013-07-12.
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