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2022-02-03Plasma Etcher for Metals (VTT Technical Research Centre of Finland Ltd)
The object of the tender process is plasma etcher for metals (later “Metal etcher”, “equipment” or “tool”). The equipment will be installed in the Micronova facility in Espoo, which is jointly used by VTT Technical Research Centre of Finland Ltd. (VTT) and Aalto University for research, development and small-volume production. The cleanroom classification is ISO 4…ISO 6 (10…1000). The total area of the cleanroom is 2 600 m2, and there is an installed equipment base of 200 processing and measurement …
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