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2013-07-12Optical profilometer, Reg. No: 433/060/2013 (Teknologian tutkimuskeskus VTT)
The optical profilometer is optical equipment using non-contact method to measure a surface's profile, in order to quantify its roughness, step height, trench depth, etc. The tool should be equipped with both Vertical Scanning Interferometry (VSI) and Phase Shifting Interferometry (PSI) measurement modes. The automated sample stage should be able to travel and measure the full range of an 8 inch (200 mm) wafer. Optical objectives should be fitted to a motorized turret so that they can be switched by …
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